Vacuum Coating Machine PVD

Item No.: 00416
Sand Blasting Machine is usedfor sand blasting inner wall bottle before electrolysis polishing.
Description Specification Review
Description

Application

Surface coating treatment of materials to improve their physical and chemical properties.
Advantages
The vacuum coating machine has: high deposition efficiency, high ionization rate, simple operation, low coat, large production capacity, and the plated film has wear resistance, corrosion resistance, high temperature resistance, good adhesion and no corrosion resistance.
Specification

000Main Technical Parameters

Performance model TG-1418 TG-1620 TG-1820 TG-2021 TG-2023 TG-2040
Vacuum chamber size(mm) 1400*H1800 1600*H2000 1800*H2000 2000*H2100 2000*H2300 2000*H4000
Vacuum chamber structure Vertical door opening, hoisting or bedroom cart structure configuration with air extraction system and water cooling system.
Vacuum measurement system One Piranl (mks)one cold cathode (mks) one film gauge (3k5)
Power type Dc power supply, intemediate frequency power supply, pulse power supply(blas power supply, arc power supply)
Ultimate vacuum index To carry state of mind 1.0-6.0*10 -4pa
Arc source 16-24set 16-24set
18-26set
18-26set
22-28set
22-32set
200A-300A 200A-300A 200A-300A
200A-300A 200A-300A
200A-300A
Bias power supply 40kw/1 set 40kw/1 set
40kw/1 set
50kw/1 set 50kw/1 set
60kw/1 set
Magnetron power supply 1-2set 1-2set
2-3set
2-3set    
Work piece rotation Multi-axis planetary rotation, frequency conversion speed regulation (controllable and adjustable)
Work piece baking temperature Controllable and adjustable from room temperature to 450℃(PID temperature control)
Process gas 3-way or 4-way process gas flow control and display system optional automatic gas filling system
Cooling method Water cooling circulation mode, additionally equipped with industrial cooling water tower or industrial chiller (refrigerator) or cryogenic system. (customer provided )
Control method PLC + touch screen operation or computer control, manual, semi-automatic, automatic mode.
Supply index Air pressure 0.5-0.8 Mpa, water temperature ≤ 25℃,water pressure ≥0.2 Mpa.
Alarm and protection Alarm for abnormal conditions such as water shortage, over-current and over- voltage, open circuit, etc. Of pumps and targets, and implement corresponding protection measures and electrical interlock functions.
Total power 100-125kw 125-145kw 145-165kw 165-185kw 185-200kw above 200kw
Output frequency Voltage 380V ± 5% frequency 50Hz(can be configured according to the customer's national electricity standard)
Equipment footprint 15-50m² 15-50m² 25-55m² 25-55m² 35-55m² 35-55m²
Remark No-standard equipment can be designed and manufactured according to user requirements, and magnetron sputtering targes, intermediate frequency sputtering targets, etc. can be added.
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