
Application
000Main Technical Parameters
| Performance model | TG-1418 | TG-1620 | TG-1820 | TG-2021 | TG-2023 | TG-2040 |
| Vacuum chamber size(mm) | 1400*H1800 | 1600*H2000 | 1800*H2000 | 2000*H2100 | 2000*H2300 | 2000*H4000 |
| Vacuum chamber structure | Vertical door opening, hoisting or bedroom cart structure configuration with air extraction system and water cooling system. |
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| Vacuum measurement system | One Piranl (mks)one cold cathode (mks) one film gauge (3k5) | |||||
| Power type | Dc power supply, intemediate frequency power supply, pulse power supply(blas power supply, arc power supply) | |||||
| Ultimate vacuum index | To carry state of mind 1.0-6.0*10 -4pa | |||||
| Arc source | 16-24set | 16-24set |
18-26set |
18-26set |
22-28set |
22-32set |
| 200A-300A | 200A-300A | 200A-300A |
200A-300A | 200A-300A |
200A-300A |
|
| Bias power supply | 40kw/1 set | 40kw/1 set |
40kw/1 set |
50kw/1 set | 50kw/1 set |
60kw/1 set |
| Magnetron power supply | 1-2set | 1-2set |
2-3set |
2-3set | ||
| Work piece rotation | Multi-axis planetary rotation, frequency conversion speed regulation (controllable and adjustable) | |||||
| Work piece baking temperature | Controllable and adjustable from room temperature to 450℃(PID temperature control) | |||||
| Process gas | 3-way or 4-way process gas flow control and display system optional automatic gas filling system | |||||
| Cooling method | Water cooling circulation mode, additionally equipped with industrial cooling water tower or industrial chiller (refrigerator) or cryogenic system. (customer provided ) | |||||
| Control method | PLC + touch screen operation or computer control, manual, semi-automatic, automatic mode. |
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| Supply index | Air pressure 0.5-0.8 Mpa, water temperature ≤ 25℃,water pressure ≥0.2 Mpa. | |||||
| Alarm and protection | Alarm for abnormal conditions such as water shortage, over-current and over- voltage, open circuit, etc. Of pumps and targets, and implement corresponding protection measures and electrical interlock functions. | |||||
| Total power | 100-125kw | 125-145kw | 145-165kw | 165-185kw | 185-200kw | above 200kw |
| Output frequency | Voltage 380V ± 5% frequency 50Hz(can be configured according to the customer's national electricity standard) | |||||
| Equipment footprint | 15-50m² | 15-50m² | 25-55m² | 25-55m² | 35-55m² | 35-55m² |
| Remark | No-standard equipment can be designed and manufactured according to user requirements, and magnetron sputtering targes, intermediate frequency sputtering targets, etc. can be added. | |||||










